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{"sheet":"params","index":0,"n_rows":126,"n_cols":13,"rows_kept":126,"cut":false,"hidden":false,"merged":[]}
[null,"(名前定義)","実験共通パラメータ・ワークシート"]
[null,"WBtitle",null,"2020.01/01 Ar(X01)"]
[null,null,"※このシートの名前定義のスコープは「ブック」全体にしてある。"]
[null,null,"※でも各計算シートでは、これらの名前を参照する表を作り、その参照表に基づいてローカルな計算をする事。計算シートのコピペ時に、名前定義が正しく参照されるように。"]
[null,null,"※このシートを別シートへコピーする時は、コピー先で同じ名前を削除してから、コピー先のブックの《末尾へ移動》コピーを作成。先ブック最初シートへコピーすると、スコープがシートに変更され上書き不可になる。"]
[]
[null,null,"Edeg","採用","秤量",null,null,null,null,null,null,"ver.Log"]
[null,null,"Deg#","μm","μm"]
[null,"ThEDtbl",1,10.199999999999999,"10.10～10.33",null,null,null,null,null,null,"20.12/09","E5照射実験用 build"]
[null,null,2,12.8,12.8,null,null,null,null,null,null,null,"2012 Kr,Ar 用から継承"]
[null,null,3,23.8,23.8]
[null,null,4,48.59,48.59]
[null,null,5,100.24,100.24]
[null,null,6,100.8,100.8]
[null,null,7,196.39,196.39]
[null,null,8,485.95,485.95]
[null,null,9,5000,5000]
[null,null,"A",5.48,5.48]
[null,null,"B",975.39,975.39]
[null,null,"C",2000,2000]
[]
[null,null,"Beam","採用","公称・秤量"]
[null,null,"Mon系","μm","μm",null,"40Ar","84Kr"]
[null,"ThAu","Au",73,50,null,73,48.8]
[null,"ThKapton","Kapton",78,75,null,78,78]
[null,"ThICal","IC1.Al",14,14]
[null,"ThICmylar","IC1.mylar",25.6,25.6,null,25.6,25.6]
[null,"ThPLmylar","PL.mylar",33.799999999999997,33.799999999999997,null,33.799999999999997,33.799999999999997]
[null,"ThPLmyAl","PL.myAl",30,"?"]
[null,"ThPL","PL.EJ212",500,100,null,500,100]
[null,null,null,"mm","mm"]
[null,"ThAir1","Air1",145,"Kap～Edeg出口",null,145,145]
[null,"ThAir2","Air2",200,"Edeg出口～SSD",null,160,160]
[null,"AirT","avr気温",27,"℃"]
[null,"AirP","avr気圧",1007,"hPa"]
[]
[null,null,"IC2","採用","公称"]
[null,"ICs_Mylar","電極Al.Mylar [μm]",4,4]
[null,"ICs_Th","空気層 [mm]",2,"2mm"]
[]
[null,null,null,"採用","秤量・公称"]
[null,null,"ssdA12","μm","μm",null,"メノコfit 結果"]
[null,"ssdA_Al","遮光Al",4.72,4.72]
[null,"ssdA1_d1","dead11",0,"??",null,0,"＋10"]
[null,"ssdA1_Th","空乏層",145,150,null,145,"±10"]
[null,"ssdA1_d2","dead12",0,"??"]
[null,null,"SSD2","μm","μm"]
[null,"ssdA2_d1","dead21",20,0,null,20,"－10"]
[null,"ssdA2_Th","空乏層",2040,1500,null,2040,"±20"]
[null,"ssdA2_d2","dead22",0,0]
[]
[null,null,null,"採用","秤量・公称"]
[null,null,"ssdB12","μm","μm"]
[null,"ssdB_Al","遮光Al",4.72,4.72]
[null,"ssdB1_d1","dead11",0,"??",null,0,"＋ 0"]
[null,"ssdB1_Th","空乏層",2050,2000,null,2050,"±20"]
[null,"ssdB1_d2","dead12",{"$f":"D55","v":0},"??"]
[null,null,"SSD2","μm","μm"]
[null,"ssdB2_d1","dead21",40,0,null,40,"±20"]
[null,"ssdB2_Th","空乏層",2000,2000,null,"> 1550"]
[null,"ssdB2_d2","dead22",0,0]
[]
[null,null,"Beam","採用","公称",null,"40Ar","84Kr"]
[null,"BeamE","E [MeV/u]",95,95,null,95,70]
[null,"BeamWS","WS_header","srim40Ar_"]
[]
[null,null,"Range","採用","予想値"]
[null,null,"Anal.","μm"]
[null,"ExpR","ExpR",3330,3351.3,null,3260,708]
[null,null,"決定",null,null,null,3260,715]
[null,null,null,"ssd Ecalib",null,null,3260,708]
[null,null,"ssdA1","採用",null,null,"±10","±10"]
[null,"ssdA1_Ea","MeV/ch"]
[null,"ssdA1_Eb","Zero [ch]"]
[null,null,"ssdA2"]
[null,"ssdA2_Ea","MeV/ch"]
[null,"ssdA2_Eb","Zero [ch]"]
[null,null,"ssdB1"]
[null,"ssdB1_Ea","MeV/ch"]
[null,"ssdB1_Eb","Zero [ch]"]
[null,null,"ssdB2"]
[null,"ssdB2_Ea","MeV/ch"]
[null,"ssdB2_Eb","Zero [ch]"]
[]
[]
[null,null,null,null,null,null,null,null,null,"数式で使用：名前の貼付け：リスト貼り付け"]
[]
[null,null,null,null,null,null,null,null,null,"AirP","=params!$D$34"]
[null,null,null,null,null,null,null,null,null,"AirT","=params!$D$33"]
[null,null,null,null,null,null,null,null,null,"BeamE","=params!$D$63"]
[null,null,null,null,null,null,null,null,null,"BeamWS","=params!$D$64"]
[null,null,null,null,null,null,null,null,null,"ExpR","=params!$D$68"]
[null,null,null,null,null,null,null,null,null,"ICs_Mylar","=params!$D$37"]
[null,null,null,null,null,null,null,null,null,"ICs_Th","=params!$D$38"]
[null,null,null,null,null,null,null,null,null,"ssdA_Al","=params!$D$42"]
[null,null,null,null,null,null,null,null,null,"ssdA1_d1","=params!$D$43"]
[null,null,null,null,null,null,null,null,null,"ssdA1_d2","=params!$D$45"]
[null,null,null,null,null,null,null,null,null,"ssdA1_Ea","=params!$D$72"]
[null,null,null,null,null,null,null,null,null,"ssdA1_Eb","=params!$D$73"]
[null,null,null,null,null,null,null,null,null,"ssdA1_Th","=params!$D$44"]
[null,null,null,null,null,null,null,null,null,"ssdA2_d1","=params!$D$47"]
[null,null,null,null,null,null,null,null,null,"ssdA2_d2","=params!$D$49"]
[null,null,null,null,null,null,null,null,null,"ssdA2_Ea","=params!$D$75"]
[null,null,null,null,null,null,null,null,null,"ssdA2_Eb","=params!$D$76"]
[null,null,null,null,null,null,null,null,null,"ssdA2_Th","=params!$D$48"]
[null,null,null,null,null,null,null,null,null,"ssdB_Al","=params!$D$53"]
[null,null,null,null,null,null,null,null,null,"ssdB1_d1","=params!$D$54"]
[null,null,null,null,null,null,null,null,null,"ssdB1_d2","=params!$D$56"]
[null,null,null,null,null,null,null,null,null,"ssdB1_Ea","=params!$D$78"]
[null,null,null,null,null,null,null,null,null,"ssdB1_Eb","=params!$D$79"]
[null,null,null,null,null,null,null,null,null,"ssdB1_Th","=params!$D$55"]
[null,null,null,null,null,null,null,null,null,"ssdB2_d1","=params!$D$58"]
[null,null,null,null,null,null,null,null,null,"ssdB2_d2","=params!$D$60"]
[null,null,null,null,null,null,null,null,null,"ssdB2_Ea","=params!$D$81"]
[null,null,null,null,null,null,null,null,null,"ssdB2_Eb","=params!$D$82"]
[null,null,null,null,null,null,null,null,null,"ssdB2_Th","=params!$D$59"]
[null,null,null,null,null,null,null,null,null,"ThAir1","=params!$D$31"]
[null,null,null,null,null,null,null,null,null,"ThAir2","=params!$D$32"]
[null,null,null,null,null,null,null,null,null,"ThAu","=params!$D$24"]
[null,null,null,null,null,null,null,null,null,"ThEDtbl","=params!$D$9:$D$20"]
[null,null,null,null,null,null,null,null,null,"ThICal","=params!$D$26"]
[null,null,null,null,null,null,null,null,null,"ThICmylar","=params!$D$27"]
[null,null,null,null,null,null,null,null,null,"ThKapton","=params!$D$25"]
[null,null,null,null,null,null,null,null,null,"ThPL","=params!$D$29"]
[null,null,null,null,null,null,null,null,null,"ThPLmylar","=params!$D$28"]
[null,null,null,null,null,null,null,null,null,"WBtitle","=params!$D$2"]

{"sheet":"1_ED検討用","index":1,"n_rows":2072,"n_cols":48,"rows_kept":2072,"cut":false,"hidden":false,"merged":[]}
[null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,"名前定義："]
[null,{"$f":"WBtitle","v":"2020.01/01 Ar(X01)"},null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,"非表示：V～AB"]
[null,null,"Edeg 選択検討用",null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,{"$f":"$D$7","v":"Ar"}]
[null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,"Gttl1",{"$f":"\"LET@\"&AF5","v":"LET@試料表面で"},null,null,null,null,"Gttl2",{"$f":"\"LET@ \"&AK5","v":"LET@ 感応層１入口で"},null,null,"Gttl2",{"$f":"\"LET@ \"&AO5","v":"LET@ 感応層２入口で"},null,null,"Gttl2",{"$f":"\"LET@ \"&AS5","v":"LET@ 感応層２出口で"}]
[null,"《本シートの参照パラメータ》",null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,"上流・組合せ",null,null,null,null,null,null,null,null,"Air2通過後 =",null,"試料表面で",null,"不感物通過後のE",null,null,"感応層１入口で",null,null,null,"感応層２入口で",null,null,"=感応層１出口","感応層２出口で"]
[null,"WS_head",{"$f":"BeamWS","v":"srim40Ar_"},null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,"Ebmから算出",null,null,null,null,null,null,null,null,"EAir2",null,null,null,"Mld1","Mld2","Mld3","Device",null,"LET in","Rng","Device",null,"LET in","Rng","Device",null,"LET in","Rng"]
[null,"BeamA",{"$f":"[1]!srInfoIonA($C$11)","v":40},{"$f":"[1]!srElmNm([1]!srInfoIonZ($C$11))","v":"Ar"},null,"上流・組み合わせ",null,null,null,null,null,null,null,null,null,null,null,null,null,null,"Th1","ＥＡｕ","Kap","IC1al","IC1my","PLmy","PLmAl","PL","EAir1","E00",null,"LET",null,{"$f":"$B$19","v":"Epoxy"},{"$f":"$B$20","v":"SiO2"},{"$f":"$B$21","v":"Kapton"},{"$f":"$B$23","v":"Si"},null,{"$f":"AK7","v":"Si"},"in Si",{"$f":"$B$23","v":"Si"},null,{"$f":"AO7","v":"Si"},"in Si",{"$f":"$B$23","v":"Si"},null,{"$f":"AS7","v":"Si"},"in Si"]
[null,"Ebm",{"$f":"BeamE","v":95},"MeV/u",null,"Au","Kap","IC1","PL",null,null,null,null,null,null,null,null,"上流/下流誤差",null,null,"μm","MeV/u",null,null,null,null,null,null,"MeV/u","MeV/u","MeV","in Si",null,"MeV/u","MeV/u","MeV/u","MeV/u","MeV",null,"μm","MeV/u","MeV",null,"μm","MeV/u","MeV",null,"μm"]
[null,"ビームライン常設",null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,0,{"$f":"IF($F9=\"\",$C$8,[1]!srEnew($C$15,$C$8,$C$47))","v":95},{"$f":"IF($G9=\"\",V9,[1]!srEnew($C$16,V9,$C$48))","v":95},{"$f":"IF($H9=\"\",W9,[1]!srEnew($C$12,W9,$C$49))","v":95},{"$f":"IF($H9=\"\",X9,[1]!srEnew($C$14,X9,$C$50))","v":95},{"$f":"IF($I9=\"\",Y9,[1]!srEnew($C$14,Y9,$C$51))","v":95},{"$f":"IF($I9=\"\",Z9,[1]!srEnew($C$12,Z9,$C$52))","v":95},{"$f":"IF($I9=\"\",AA9,[1]!srEnew($C$17,AA9,$C$53))","v":95},{"$f":"[1]!srEnewGas($C$13,AB9,$C$56,$C$61*100,$C$60)","v":94.06419669439542},{"$f":"[1]!srEnewGas($C$13,AC9,$C$57,$C$61*100,$C$60)","v":92.718570228534929},{"$f":"AD9*$C$7","v":3708.7428091413972},{"$f":"[1]!srE2LETt($C$11,AD9,0)","v":2.0714068825652503},null,{"$f":"[1]!srEnew($C$19,$AD9,$C$38)","v":86.677313037676328},{"$f":"[1]!srEnew($C$20,AH9,$C$39)","v":83.9599217333285},{"$f":"[1]!srEnew($C$21,AI9,$C$40)","v":83.9599217333285},{"$f":"[1]!srEnew($C$23,AJ9,$C$41)","v":82.657838399995171},{"$f":"AK9*$C$7","v":3306.3135359998068},{"$f":"[1]!srE2LETt($C$23,AK9,0)","v":2.2553503279795888},{"$f":"[1]!srE2Rng($C$23,AK9)","v":3678.1219891196292},{"$f":"[1]!srEnew($C$23,AK9,$C$42)","v":82.5927342333285},{"$f":"AO9*$C$7","v":3303.7093693331399},{"$f":"[1]!srE2LETt($C$23,AO9,0)","v":2.2566217331879219},{"$f":"[1]!srE2Rng($C$23,AO9)","v":3673.1219891196288},{"$f":"[1]!srEnew($C$23,AO9,$C$43)","v":82.332317566661828},{"$f":"AS9*$C$7","v":3293.2927026664729},{"$f":"[1]!srE2LETt($C$23,AS9,0)","v":2.2617073540212553},{"$f":"[1]!srE2Rng($C$23,AS9)","v":3653.1219891196283}]
[null,"Mat","SRIM Fit W.S.name",null,null,null,"○",null,null,null,null,null,null,null,null,null,"EAir1:上流 =",{"$f":"$AC$17","v":84.176097235982908},"MeV/u　上流から計算",null,0,{"$f":"IF($F10=\"\",$C$8,[1]!srEnew($C$15,$C$8,$C$47))","v":95},{"$f":"IF($G10=\"\",V10,[1]!srEnew($C$16,V10,$C$48))","v":94.366883116883116},{"$f":"IF($H10=\"\",W10,[1]!srEnew($C$12,W10,$C$49))","v":94.366883116883116},{"$f":"IF($H10=\"\",X10,[1]!srEnew($C$14,X10,$C$50))","v":94.366883116883116},{"$f":"IF($I10=\"\",Y10,[1]!srEnew($C$14,Y10,$C$51))","v":94.366883116883116},{"$f":"IF($I10=\"\",Z10,[1]!srEnew($C$12,Z10,$C$52))","v":94.366883116883116},{"$f":"IF($I10=\"\",AA10,[1]!srEnew($C$17,AA10,$C$53))","v":94.366883116883116},{"$f":"[1]!srEnewGas($C$13,AB10,$C$56,$C$61*100,$C$60)","v":93.413162946743626},{"$f":"[1]!srEnewGas($C$13,AC10,$C$57,$C$61*100,$C$60)","v":92.049884981198005},3681.9953992479204,{"$f":"[1]!srE2LETt($C$11,AD10,0)","v":2.0828598988033939},null,{"$f":"[1]!srEnew($C$19,$AD10,$C$38)","v":85.981880380445915},{"$f":"[1]!srEnew($C$20,AH10,$C$39)","v":83.264489076098087},{"$f":"[1]!srEnew($C$21,AI10,$C$40)","v":83.264489076098087},{"$f":"[1]!srEnew($C$23,AJ10,$C$41)","v":81.962405742764759},3278.4962297105903,{"$f":"[1]!srE2LETt($C$23,AK10,0)","v":2.2689312821291874},{"$f":"[1]!srE2Rng($C$23,AK10)","v":3624.7127610443335},{"$f":"[1]!srEnew($C$23,AK10,$C$42)","v":81.897301576098087},3275.8920630439234,{"$f":"[1]!srE2LETt($C$23,AO10,0)","v":2.270202687337521},{"$f":"[1]!srE2Rng($C$23,AO10)","v":3619.7127610443331},{"$f":"[1]!srEnew($C$23,AO10,$C$43)","v":81.636884909431416},3265.4753963772564,{"$f":"[1]!srE2LETt($C$23,AS10,0)","v":2.2752883081708544},{"$f":"[1]!srE2Rng($C$23,AS10)","v":3599.7127610443326}]
[1,"Si",{"$f":"$C$6&B11","v":"srim40Ar_Si"},null,null,null,"○","○",null,null,null,null,null,null,null,null,"EAir1:下流 =",{"$f":"$AC$24","v":83.866279069767444},"MeV/u　下流 ExpR実測から",null,0,{"$f":"IF($F11=\"\",$C$8,[1]!srEnew($C$15,$C$8,$C$47))","v":95},{"$f":"IF($G11=\"\",V11,[1]!srEnew($C$16,V11,$C$48))","v":94.366883116883116},{"$f":"IF($H11=\"\",W11,[1]!srEnew($C$12,W11,$C$49))","v":94.184591450216445},{"$f":"IF($H11=\"\",X11,[1]!srEnew($C$14,X11,$C$50))","v":93.974065134426965},{"$f":"IF($I11=\"\",Y11,[1]!srEnew($C$14,Y11,$C$51))","v":93.974065134426965},{"$f":"IF($I11=\"\",Z11,[1]!srEnew($C$12,Z11,$C$52))","v":93.974065134426965},{"$f":"IF($I11=\"\",AA11,[1]!srEnew($C$17,AA11,$C$53))","v":93.974065134426965},{"$f":"[1]!srEnewGas($C$13,AB11,$C$56,$C$61*100,$C$60)","v":92.998276538306783},{"$f":"[1]!srEnewGas($C$13,AC11,$C$57,$C$61*100,$C$60)","v":91.634998572761162},3665.3999429104465,{"$f":"[1]!srE2LETt($C$11,AD11,0)","v":2.0899659338052672},null,{"$f":"[1]!srEnew($C$19,$AD11,$C$38)","v":85.550398515671617},{"$f":"[1]!srEnew($C$20,AH11,$C$39)","v":82.833007211323789},{"$f":"[1]!srEnew($C$21,AI11,$C$40)","v":82.833007211323789},{"$f":"[1]!srEnew($C$23,AJ11,$C$41)","v":81.530923877990446},3261.236955119618,{"$f":"[1]!srE2LETt($C$23,AK11,0)","v":2.2773575982662821},{"$f":"[1]!srE2Rng($C$23,AK11)","v":3591.5749538296664},{"$f":"[1]!srEnew($C$23,AK11,$C$42)","v":81.465819711323775},3258.632788452951,{"$f":"[1]!srE2LETt($C$23,AO11,0)","v":2.2786290034746157},{"$f":"[1]!srE2Rng($C$23,AO11)","v":3586.5749538296659},{"$f":"[1]!srEnew($C$23,AO11,$C$43)","v":81.203464046598725},3248.1385618639488,{"$f":"[1]!srE2LETt($C$23,AS11,0)","v":2.2838940246585944},{"$f":"[1]!srE2Rng($C$23,AS11)","v":3566.5749538296664}]
[2,"Al","srim40Ar_Al",null,null,null,"○",null,"○",null,null,null,null,null,null,null,null,{"$f":"R10/R11","v":1.003694192345862},"比 上流/下流",null,0,{"$f":"IF($F12=\"\",$C$8,[1]!srEnew($C$15,$C$8,$C$47))","v":95},{"$f":"IF($G12=\"\",V12,[1]!srEnew($C$16,V12,$C$48))","v":94.366883116883116},{"$f":"IF($H12=\"\",W12,[1]!srEnew($C$12,W12,$C$49))","v":94.366883116883116},{"$f":"IF($H12=\"\",X12,[1]!srEnew($C$14,X12,$C$50))","v":94.366883116883116},{"$f":"IF($I12=\"\",Y12,[1]!srEnew($C$14,Y12,$C$51))","v":94.088922590567321},{"$f":"IF($I12=\"\",Z12,[1]!srEnew($C$12,Z12,$C$52))","v":93.694850763271802},{"$f":"IF($I12=\"\",AA12,[1]!srEnew($C$17,AA12,$C$53))","v":90.334635709508362},{"$f":"[1]!srEnewGas($C$13,AB12,$C$56,$C$61*100,$C$60)","v":89.346259184487792},{"$f":"[1]!srEnewGas($C$13,AC12,$C$57,$C$61*100,$C$60)","v":87.982981218942172},3519.3192487576871,{"$f":"[1]!srE2LETt($C$11,AD12,0)","v":2.1525164599636484},null,{"$f":"[1]!srEnew($C$19,$AD12,$C$38)","v":81.752300467699854},{"$f":"[1]!srEnew($C$20,AH12,$C$39)","v":78.934223216231672},{"$f":"[1]!srEnew($C$21,AI12,$C$40)","v":78.934223216231672},{"$f":"[1]!srEnew($C$23,AJ12,$C$41)","v":77.575527564057765},3103.0211025623107,{"$f":"[1]!srE2LETt($C$23,AK12,0)","v":2.3657771895863648},{"$f":"[1]!srE2Rng($C$23,AK12)","v":3299.5588287146516},{"$f":"[1]!srEnew($C$23,AK12,$C$42)","v":77.507592781449077},3100.3037112579632,{"$f":"[1]!srE2LETt($C$23,AO12,0)","v":2.367310489586365},{"$f":"[1]!srE2Rng($C$23,AO12)","v":3294.558828714652},{"$f":"[1]!srEnew($C$23,AO12,$C$43)","v":77.235853651014295},3089.4341460405717,{"$f":"[1]!srE2LETt($C$23,AS12,0)","v":2.3734436895863649},{"$f":"[1]!srE2Rng($C$23,AS12)","v":3274.558828714652}]
[3,"Air","srim40Ar_Air",null,null,null,"○","○","○",null,null,null,null,null,null,null,null,"Rng in Al(EAir1)",null,null,0,{"$f":"IF($F13=\"\",$C$8,[1]!srEnew($C$15,$C$8,$C$47))","v":95},{"$f":"IF($G13=\"\",V13,[1]!srEnew($C$16,V13,$C$48))","v":94.366883116883116},{"$f":"IF($H13=\"\",W13,[1]!srEnew($C$12,W13,$C$49))","v":94.184591450216445},{"$f":"IF($H13=\"\",X13,[1]!srEnew($C$14,X13,$C$50))","v":93.974065134426965},{"$f":"IF($I13=\"\",Y13,[1]!srEnew($C$14,Y13,$C$51))","v":93.69388972899246},{"$f":"IF($I13=\"\",Z13,[1]!srEnew($C$12,Z13,$C$52))","v":93.277223062325788},{"$f":"IF($I13=\"\",AA13,[1]!srEnew($C$17,AA13,$C$53))","v":89.917008008562348},{"$f":"[1]!srEnewGas($C$13,AB13,$C$56,$C$61*100,$C$60)","v":88.928631483541778},{"$f":"[1]!srEnewGas($C$13,AC13,$C$57,$C$61*100,$C$60)","v":87.565353517996158},3502.6141407198465,{"$f":"[1]!srE2LETt($C$11,AD13,0)","v":2.1596694469025439},null,{"$f":"[1]!srEnew($C$19,$AD13,$C$38)","v":81.317967658716015},{"$f":"[1]!srEnew($C$20,AH13,$C$39)","v":78.480148006839471},{"$f":"[1]!srEnew($C$21,AI13,$C$40)","v":78.480148006839471},{"$f":"[1]!srEnew($C$23,AJ13,$C$41)","v":77.12145235466555},3084.8580941866221,{"$f":"[1]!srE2LETt($C$23,AK13,0)","v":2.3760257469795842},{"$f":"[1]!srE2Rng($C$23,AK13)","v":3266.1388933033845},{"$f":"[1]!srEnew($C$23,AK13,$C$42)","v":77.053517572056862},3082.1407028822746,{"$f":"[1]!srE2LETt($C$23,AO13,0)","v":2.377559046979584},{"$f":"[1]!srE2Rng($C$23,AO13)","v":3261.138893303385},{"$f":"[1]!srEnew($C$23,AO13,$C$43)","v":76.78177844162208},3071.2711376648831,{"$f":"[1]!srE2LETt($C$23,AS13,0)","v":2.3836922469795843},{"$f":"[1]!srE2Rng($C$23,AS13)","v":3241.138893303385}]
[4,"Mylar","srim40Ar_Mylar",null,null,"○","○",null,null,null,null,null,null,null,null,null,"上流 =",{"$f":"[1]!srE2Rng($C$12,R10)","v":3351.3154898356242},"μm",null,0,{"$f":"IF($F14=\"\",$C$8,[1]!srEnew($C$15,$C$8,$C$47))","v":90.491022029976861},{"$f":"IF($G14=\"\",V14,[1]!srEnew($C$16,V14,$C$48))","v":89.813938696643532},{"$f":"IF($H14=\"\",W14,[1]!srEnew($C$12,W14,$C$49))","v":89.813938696643532},{"$f":"IF($H14=\"\",X14,[1]!srEnew($C$14,X14,$C$50))","v":89.813938696643532},{"$f":"IF($I14=\"\",Y14,[1]!srEnew($C$14,Y14,$C$51))","v":89.813938696643532},{"$f":"IF($I14=\"\",Z14,[1]!srEnew($C$12,Z14,$C$52))","v":89.813938696643532},{"$f":"IF($I14=\"\",AA14,[1]!srEnew($C$17,AA14,$C$53))","v":89.813938696643532},{"$f":"[1]!srEnewGas($C$13,AB14,$C$56,$C$61*100,$C$60)","v":88.825562171622963},{"$f":"[1]!srEnewGas($C$13,AC14,$C$57,$C$61*100,$C$60)","v":87.460509345186864},3498.4203738074748,{"$f":"[1]!srE2LETt($C$11,AD14,0)","v":2.1615600044678644},null,{"$f":"[1]!srEnew($C$19,$AD14,$C$38)","v":81.208863901236327},{"$f":"[1]!srEnew($C$20,AH14,$C$39)","v":78.367954810327234},{"$f":"[1]!srEnew($C$21,AI14,$C$40)","v":78.367954810327234},{"$f":"[1]!srEnew($C$23,AJ14,$C$41)","v":77.009259158153327},3080.3703663261331,{"$f":"[1]!srE2LETt($C$23,AK14,0)","v":2.3785579671708676},{"$f":"[1]!srE2Rng($C$23,AK14)","v":3257.8814740400849},{"$f":"[1]!srEnew($C$23,AK14,$C$42)","v":76.941324375544625},3077.6529750217851,{"$f":"[1]!srE2LETt($C$23,AO14,0)","v":2.3800912671708678},{"$f":"[1]!srE2Rng($C$23,AO14)","v":3252.8814740400844},{"$f":"[1]!srEnew($C$23,AO14,$C$43)","v":76.669585245109843},3066.7834098043936,{"$f":"[1]!srE2LETt($C$23,AS14,0)","v":2.3862244671708677},{"$f":"[1]!srE2Rng($C$23,AS14)","v":3232.8814740400844}]
[5,"Au","srim40Ar_Au",null,null,"○","○","○",null,null,null,null,null,null,null,null,"下流 =",{"$f":"[1]!srE2Rng($C$12,R11)","v":3330},"μm",null,0,{"$f":"IF($F15=\"\",$C$8,[1]!srEnew($C$15,$C$8,$C$47))","v":90.491022029976861},{"$f":"IF($G15=\"\",V15,[1]!srEnew($C$16,V15,$C$48))","v":89.813938696643532},{"$f":"IF($H15=\"\",W15,[1]!srEnew($C$12,W15,$C$49))","v":89.61949425219909},{"$f":"IF($H15=\"\",X15,[1]!srEnew($C$14,X15,$C$50))","v":89.400316170007301},{"$f":"IF($I15=\"\",Y15,[1]!srEnew($C$14,Y15,$C$51))","v":89.400316170007301},{"$f":"IF($I15=\"\",Z15,[1]!srEnew($C$12,Z15,$C$52))","v":89.400316170007301},{"$f":"IF($I15=\"\",AA15,[1]!srEnew($C$17,AA15,$C$53))","v":89.400316170007301},{"$f":"[1]!srEnewGas($C$13,AB15,$C$56,$C$61*100,$C$60)","v":88.411939644986731},{"$f":"[1]!srEnewGas($C$13,AC15,$C$57,$C$61*100,$C$60)","v":87.02742222906187},3481.0968891624748,{"$f":"[1]!srE2LETt($C$11,AD15,0)","v":2.1700176692118522},null,{"$f":"[1]!srEnew($C$19,$AD15,$C$38)","v":80.757731488606112},{"$f":"[1]!srEnew($C$20,AH15,$C$39)","v":77.916822397697018},{"$f":"[1]!srEnew($C$21,AI15,$C$40)","v":77.916822397697018},{"$f":"[1]!srEnew($C$23,AJ15,$C$41)","v":76.558126745523111},3062.3250698209245,{"$f":"[1]!srE2LETt($C$23,AK15,0)","v":2.3887401051232362},{"$f":"[1]!srE2Rng($C$23,AK15)","v":3224.6781284705012},{"$f":"[1]!srEnew($C$23,AK15,$C$42)","v":76.490191962914423},3059.6076785165769,{"$f":"[1]!srE2LETt($C$23,AO15,0)","v":2.3902734051232359},{"$f":"[1]!srE2Rng($C$23,AO15)","v":3219.6781284705016},{"$f":"[1]!srEnew($C$23,AO15,$C$43)","v":76.218452832479642},3048.7381132991859,{"$f":"[1]!srE2LETt($C$23,AS15,0)","v":2.3964066051232362},{"$f":"[1]!srE2Rng($C$23,AS15)","v":3199.6781284705016}]
[6,"Kapton","srim40Ar_Kapton",null,null,"○","○",null,"○",null,null,null,null,null,null,null,"上流 - 下流 =",{"$f":"R14-R15","v":21.315489835624248},"μm Al 相当Range差",null,0,{"$f":"IF($F16=\"\",$C$8,[1]!srEnew($C$15,$C$8,$C$47))","v":90.491022029976861},{"$f":"IF($G16=\"\",V16,[1]!srEnew($C$16,V16,$C$48))","v":89.813938696643532},{"$f":"IF($H16=\"\",W16,[1]!srEnew($C$12,W16,$C$49))","v":89.813938696643532},{"$f":"IF($H16=\"\",X16,[1]!srEnew($C$14,X16,$C$50))","v":89.813938696643532},{"$f":"IF($I16=\"\",Y16,[1]!srEnew($C$14,Y16,$C$51))","v":89.524555134999687},{"$f":"IF($I16=\"\",Z16,[1]!srEnew($C$12,Z16,$C$52))","v":89.10788846833303},{"$f":"IF($I16=\"\",AA16,[1]!srEnew($C$17,AA16,$C$53))","v":85.648109404033761},{"$f":"[1]!srEnewGas($C$13,AB16,$C$56,$C$61*100,$C$60)","v":84.613221042541639},{"$f":"[1]!srEnewGas($C$13,AC16,$C$57,$C$61*100,$C$60)","v":83.185788819793871},3327.4315527917547,{"$f":"[1]!srE2LETt($C$11,AD16,0)","v":2.2450400982686305},null,{"$f":"[1]!srEnew($C$19,$AD16,$C$38)","v":76.75603002061861},{"$f":"[1]!srEnew($C$20,AH16,$C$39)","v":73.835739534322414},{"$f":"[1]!srEnew($C$21,AI16,$C$40)","v":73.835739534322414},{"$f":"[1]!srEnew($C$23,AJ16,$C$41)","v":72.382251162229394},2895.2900464891759,{"$f":"[1]!srE2LETt($C$23,AK16,0)","v":2.4926281911852657},{"$f":"[1]!srE2Rng($C$23,AK16)","v":2929.8988799613821},{"$f":"[1]!srEnew($C$23,AK16,$C$42)","v":72.309576743624746},2892.3830697449898,{"$f":"[1]!srE2LETt($C$23,AO16,0)","v":2.4945360330457307},{"$f":"[1]!srE2Rng($C$23,AO16)","v":2924.8988799613826},{"$f":"[1]!srEnew($C$23,AO16,$C$43)","v":72.018879069206136},2880.7551627682456,{"$f":"[1]!srE2LETt($C$23,AS16,0)","v":2.5021674004875916},{"$f":"[1]!srE2Rng($C$23,AS16)","v":2904.8988799613821}]
[7,"EJ212","srim40Ar_EJ212",null,null,"○","○","○","○",null,null,null,null,null,null,null,null,null,null,null,0,{"$f":"IF($F17=\"\",$C$8,[1]!srEnew($C$15,$C$8,$C$47))","v":90.491022029976861},{"$f":"IF($G17=\"\",V17,[1]!srEnew($C$16,V17,$C$48))","v":89.813938696643532},{"$f":"IF($H17=\"\",W17,[1]!srEnew($C$12,W17,$C$49))","v":89.61949425219909},{"$f":"IF($H17=\"\",X17,[1]!srEnew($C$14,X17,$C$50))","v":89.400316170007301},{"$f":"IF($I17=\"\",Y17,[1]!srEnew($C$14,Y17,$C$51))","v":89.11093260836347},{"$f":"IF($I17=\"\",Z17,[1]!srEnew($C$12,Z17,$C$52))","v":88.694265941696798},{"$f":"IF($I17=\"\",AA17,[1]!srEnew($C$17,AA17,$C$53))","v":85.21098559747503},{"$f":"[1]!srEnewGas($C$13,AB17,$C$56,$C$61*100,$C$60)","v":84.176097235982908},{"$f":"[1]!srEnewGas($C$13,AC17,$C$57,$C$61*100,$C$60)","v":82.74866501323514},3309.9466005294057,{"$f":"[1]!srE2LETt($C$11,AD17,0)","v":2.2535765946681736},null,{"$f":"[1]!srEnew($C$19,$AD17,$C$38)","v":76.300692722119933},{"$f":"[1]!srEnew($C$20,AH17,$C$39)","v":73.347084872518948},{"$f":"[1]!srEnew($C$21,AI17,$C$40)","v":73.347084872518948},{"$f":"[1]!srEnew($C$23,AJ17,$C$41)","v":71.893596500425929},2875.7438600170372,{"$f":"[1]!srE2LETt($C$23,AK17,0)","v":2.5054563064560829},{"$f":"[1]!srE2Rng($C$23,AK17)","v":2896.279439229304},{"$f":"[1]!srEnew($C$23,AK17,$C$42)","v":71.82092208182128},2872.8368832728511,{"$f":"[1]!srE2LETt($C$23,AO17,0)","v":2.5073641483165479},{"$f":"[1]!srE2Rng($C$23,AO17)","v":2891.279439229304},{"$f":"[1]!srEnew($C$23,AO17,$C$43)","v":71.53022440740267},2861.2089762961068,{"$f":"[1]!srE2LETt($C$23,AS17,0)","v":2.5149955157584083},{"$f":"[1]!srE2Rng($C$23,AS17)","v":2871.2794392293035}]
[null,"照射物表面・モールド材質"]
["Mld1","Epoxy",{"$f":"$C$6&B19","v":"srim40Ar_Epoxy"},null,null,null,null,null,null,null,null,null,null,null,null,null,"RinAl(Ebm)=",{"$f":"[1]!srE2Rng($C$12,$C$8)","v":4126},"μm",null,"Edeg出口で",null,null,null,null,null,null,null,null,null,null,"試料表面で",null,"不感物通過後のE",null,null,"感応層１入口で",null,null,null,"感応層２入口で",null,null,"=感応層１出口","感応層２出口で"]
["Mld2","SiO2",{"$f":"$C$6&B20","v":"srim40Ar_SiO2"},null,null,null,"(全sort済)",null,null,null,null,null,null,null,null,null,null,"ED",null,null,"ExR-ED",null,null,null,null,null,null,null,null,"EAir2",null,null,null,"Mld1","Mld2","Mld3","Device",null,"LET in","Rng in","Device",null,"LET in","Rng in","Device",null,"LET in","Rng in"]
["Mld3","Kapton",{"$f":"$C$6&B21","v":"srim40Ar_Kapton"},null,null,null,"Al-Edeg 組合せ (Ptn文字)",null,null,null,null,null,null,null,null,null,null,"Th0","⊿Th",null,"Th1","ＥＡｕ","Ekap","EIC1","EIC1","EPLmy",null,"EPL","EAir1","E00",null,"LET",null,{"$f":"$B$19","v":"Epoxy"},{"$f":"$B$20","v":"SiO2"},{"$f":"$B$21","v":"Kapton"},{"$f":"$B$23","v":"Si"},null,{"$f":"AK21","v":"Si"},{"$f":"AK21","v":"Si"},{"$f":"$B$23","v":"Si"},null,{"$f":"AO21","v":"Si"},{"$f":"AO21","v":"Si"},{"$f":"$B$23","v":"Si"},null,{"$f":"AS21","v":"Si"},{"$f":"AS21","v":"Si"}]
[null,"照射物・材質",null,null,null,1,2,3,4,5,6,7,8,9,"A","B","C","μm","μm","EDstr","μm","MeV/u","MeV/u","MeV/u","MeV/u","MeV/u",null,"MeV/u","MeV/u","MeV/u","MeV","in Si",null,"MeV/u","MeV/u","MeV/u","MeV/u","MeV",null,"μm","MeV/u","MeV",null,"μm","MeV/u","MeV",null,"μm"]
["Dev","Si",{"$f":"$C$6&B23","v":"srim40Ar_Si"},null,null,null,null,null,null,null,null,null,null,null,null,null,null,{"$f":"[2]!e5aEDthkI(ThEDtbl,F23:Q23)","v":0},null,{"$f":"[2]!e5aEDflgI2S(F23:Q23)","v":"0000000000000"},{"$f":"$C$65-$R23","v":3330},null,null,null,null,null,null,null,{"$f":"[1]!srRng2E($C$12,U23)","v":83.866279069767444},{"$f":"[1]!srEnewGas($C$13,AC23,$C$57,$C$61*100,$C$60)","v":82.438846847019676},{"$f":"AD23*$C$7","v":3297.5538738807873},{"$f":"[1]!srE2LETt($C$11,AD23,0)","v":2.2596269667154716},null,{"$f":"[1]!srEnew($C$19,$AD23,$C$38)","v":75.977965465645497},{"$f":"[1]!srEnew($C$20,AH23,$C$39)","v":73.000743426546393},{"$f":"[1]!srEnew($C$21,AI23,$C$40)","v":73.000743426546393},{"$f":"[1]!srEnew($C$23,AJ23,$C$41)","v":71.547255054453373},{"$f":"AK23*$C$7","v":2861.890202178135},{"$f":"[1]!srE2LETt($C$23,AK23,0)","v":2.5145484288469757},{"$f":"[1]!srE2Rng($C$23,AK23)","v":2872.4511477463921},{"$f":"[1]!srEnew($C$23,AK23,$C$42)","v":71.474580635848724},{"$f":"AO23*$C$7","v":2858.983225433949},{"$f":"[1]!srE2LETt($C$23,AO23,0)","v":2.5164562707074407},{"$f":"[1]!srE2Rng($C$23,AO23)","v":2867.4511477463921},{"$f":"[1]!srEnew($C$23,AO23,$C$43)","v":71.183882961430115},{"$f":"AS23*$C$7","v":2847.3553184572047},{"$f":"[1]!srE2LETt($C$23,AS23,0)","v":2.5240876381493011},{"$f":"[1]!srE2Rng($C$23,AS23)","v":2847.4511477463921}]
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["Mld1",{"$f":"B19","v":"Epoxy"},500,"µm 不感1",null,1,0,0,0,0,0,0,0,0,0,0,0,{"$f":"[2]!e5aEDthkI(ThEDtbl,F26:Q26)","v":10.199999999999999},{"$f":"R26-R25","v":4.7199999999999989},{"$f":"[2]!e5aEDflgI2S(F26:Q26)","v":"1000000000000"},3319.8,null,null,null,null,null,null,null,{"$f":"[1]!srRng2E($C$12,U26)","v":83.718023255813961},{"$f":"[1]!srEnewGas($C$13,AC26,$C$57,$C$61*100,$C$60)","v":82.290591033066192},3291.6236413226479,{"$f":"[1]!srE2LETt($C$11,AD26,0)","v":2.2625222224829136},null,{"$f":"[1]!srEnew($C$19,$AD26,$C$38)","v":75.823532326110623},{"$f":"[1]!srEnew($C$20,AH26,$C$39)","v":72.835010301191886},{"$f":"[1]!srEnew($C$21,AI26,$C$40)","v":72.835010301191886},{"$f":"[1]!srEnew($C$23,AJ26,$C$41)","v":71.381521929098867},2855.2608771639548,{"$f":"[1]!srE2LETt($C$23,AK26,0)","v":2.5188992389434022},{"$f":"[1]!srE2Rng($C$23,AK26)","v":2861.0487087220022},{"$f":"[1]!srEnew($C$23,AK26,$C$42)","v":71.308847510494218},{"$f":"AO26*$C$7","v":2852.3539004197687},{"$f":"[1]!srE2LETt($C$23,AO26,0)","v":2.5208070808038672},{"$f":"[1]!srE2Rng($C$23,AO26)","v":2856.0487087220022},{"$f":"[1]!srEnew($C$23,AO26,$C$43)","v":71.018149836075608},{"$f":"AS26*$C$7","v":2840.7259934430244},{"$f":"[1]!srE2LETt($C$23,AS26,0)","v":2.5284384482457276},{"$f":"[1]!srE2Rng($C$23,AS26)","v":2836.0487087220017}]
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["Mld3",{"$f":"B21","v":"Kapton"},0,"µm 不感3",null,1,0,0,0,0,0,0,0,0,"A",0,0,{"$f":"[2]!e5aEDthkI(ThEDtbl,F28:Q28)","v":15.68},2.879999999999999,{"$f":"[2]!e5aEDflgI2S(F28:Q28)","v":"100000000A000"},3314.32,null,null,null,null,null,null,null,{"$f":"[1]!srRng2E($C$12,U28)","v":83.638372093023264},{"$f":"[1]!srEnewGas($C$13,AC28,$C$57,$C$61*100,$C$60)","v":82.210939870275496},3288.4375948110201,{"$f":"[1]!srE2LETt($C$11,AD28,0)","v":2.2640777128364018},null,{"$f":"[1]!srEnew($C$19,$AD28,$C$38)","v":75.740562364870314},{"$f":"[1]!srEnew($C$20,AH28,$C$39)","v":72.745969367177892},{"$f":"[1]!srEnew($C$21,AI28,$C$40)","v":72.745969367177892},{"$f":"[1]!srEnew($C$23,AJ28,$C$41)","v":71.292480995084873},2851.6992398033949,{"$f":"[1]!srE2LETt($C$23,AK28,0)","v":2.5212367329952077},{"$f":"[1]!srE2Rng($C$23,AK28)","v":2854.9226924618392},{"$f":"[1]!srEnew($C$23,AK28,$C$42)","v":71.219806576480224},2848.7922630592088,{"$f":"[1]!srE2LETt($C$23,AO28,0)","v":2.5231445748556727},{"$f":"[1]!srE2Rng($C$23,AO28)","v":2849.9226924618392},{"$f":"[1]!srEnew($C$23,AO28,$C$43)","v":70.929108902061614},2837.1643560824646,{"$f":"[1]!srE2LETt($C$23,AS28,0)","v":2.5307759422975336},{"$f":"[1]!srE2Rng($C$23,AS28)","v":2829.9226924618392}]
[null,"不感3～感応層1まで",null,null,null,0,2,0,0,0,0,0,0,0,"A",0,0,{"$f":"[2]!e5aEDthkI(ThEDtbl,F29:Q29)","v":18.28},{"$f":"R29-R27","v":5.48},{"$f":"[2]!e5aEDflgI2S(F29:Q29)","v":"020000000A000"},3311.72,null,null,null,null,null,null,null,{"$f":"[1]!srRng2E($C$12,U29)","v":83.60058139534884},{"$f":"[1]!srEnewGas($C$13,AC29,$C$57,$C$61*100,$C$60)","v":82.173149172601072},3286.925966904043,{"$f":"[1]!srE2LETt($C$11,AD29,0)","v":2.264815719208495},null,{"$f":"[1]!srEnew($C$19,$AD29,$C$38)","v":75.701197054792786},{"$f":"[1]!srEnew($C$20,AH29,$C$39)","v":72.703723668558112},{"$f":"[1]!srEnew($C$21,AI29,$C$40)","v":72.703723668558112},{"$f":"[1]!srEnew($C$23,AJ29,$C$41)","v":71.250235296465092},2850.0094118586039,{"$f":"[1]!srE2LETt($C$23,AK29,0)","v":2.522345763019787},{"$f":"[1]!srE2Rng($C$23,AK29)","v":2852.0161883967985},{"$f":"[1]!srEnew($C$23,AK29,$C$42)","v":71.177560877860444},2847.1024351144179,{"$f":"[1]!srE2LETt($C$23,AO29,0)","v":2.524253604880252},{"$f":"[1]!srE2Rng($C$23,AO29)","v":2847.0161883967985},{"$f":"[1]!srEnew($C$23,AO29,$C$43)","v":70.886863203441834},2835.4745281376736,{"$f":"[1]!srE2LETt($C$23,AS29,0)","v":2.5318849723221128},{"$f":"[1]!srE2Rng($C$23,AS29)","v":2827.016188396798}]
["Dev1",{"$f":"B23","v":"Si"},100,"µm 不感4",null,1,2,0,0,0,0,0,0,0,0,0,0,{"$f":"[2]!e5aEDthkI(ThEDtbl,F30:Q30)","v":23},4.7199999999999989,{"$f":"[2]!e5aEDflgI2S(F30:Q30)","v":"1200000000000"},3307,null,null,null,null,null,null,null,{"$f":"[1]!srRng2E($C$12,U30)","v":83.531976744186053},{"$f":"[1]!srEnewGas($C$13,AC30,$C$57,$C$61*100,$C$60)","v":82.104544521438285},3284.1817808575315,{"$f":"[1]!srE2LETt($C$11,AD30,0)","v":2.2661554846224483},null,{"$f":"[1]!srEnew($C$19,$AD30,$C$38)","v":75.629733876498221},{"$f":"[1]!srEnew($C$20,AH30,$C$39)","v":72.627031477217599},{"$f":"[1]!srEnew($C$21,AI30,$C$40)","v":72.627031477217599},{"$f":"[1]!srEnew($C$23,AJ30,$C$41)","v":71.17354310512458},2846.9417242049831,{"$f":"[1]!srE2LETt($C$23,AK30,0)","v":2.5243590790644079},{"$f":"[1]!srE2Rng($C$23,AK30)","v":2846.7397656325711},{"$f":"[1]!srEnew($C$23,AK30,$C$42)","v":71.100868686519931},2844.034747460797,{"$f":"[1]!srE2LETt($C$23,AO30,0)","v":2.5262669209248729},{"$f":"[1]!srE2Rng($C$23,AO30)","v":2841.7397656325711},{"$f":"[1]!srEnew($C$23,AO30,$C$43)","v":70.810171012101321},2832.4068404840527,{"$f":"[1]!srE2LETt($C$23,AS30,0)","v":2.5338982883667334},{"$f":"[1]!srE2Rng($C$23,AS30)","v":2821.7397656325711}]
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[null,"照射物表面・モールド材質"]
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["Mld3","Kapton","srim40Ar_Kapton",null,null,1,2,3,0,0,0,0,8,0,"A",0,0,{"$f":"[2]!e5aEDthkI(ThEDtbl,F17:Q17)","v":538.23},null,{"$f":"[2]!e5aEDflgI2S(F17:Q17)","v":"123000080A000"},{"$f":"$C$33-$R17","v":2791.77},{"$f":"[1]!srRng2E($C$11,U17)","v":75.652656250000007},null,{"$f":"[1]!srEnewGas($C$12,V17,$C$36,$C$38*100,$C$37)","v":74.078410147552546},{"$f":"X17*$C$7","v":2963.1364059021016},null,{"$f":"AA16","v":45},{"$f":"[1]!srEnew($C$15,X17,AB15)","v":63.689227030505364},{"$f":"[1]!srEnew($C$16,AB17,AC15)","v":58.844831440626862},{"$f":"[1]!srEnew($C$17,AC17,AD15)","v":58.844831440626862},{"$f":"[1]!srEnew($C$19,AD17,AE15)","v":56.518822291986908},{"$f":"AE17*$C$7","v":2260.7528916794763},{"$f":"[1]!srE2LETt($C$19,AE17,0)","v":3.0031937142838072},{"$f":"[1]!srE2Rng($C$19,AE17)","v":1916.344395352804},{"$f":"[1]!srEnew($C$19,AE17,AI15)","v":56.402521834554911},{"$f":"AI17*$C$7","v":2256.1008733821964},{"$f":"[1]!srE2LETt($C$19,AI17,0)","v":3.0075127783275142},{"$f":"[1]!srE2Rng($C$19,AI17)","v":1909.2733275409387},{"$f":"[1]!srEnew($C$19,AI17,AM15)","v":55.900534123041851},{"$f":"AM17*$C$7","v":2236.0213649216739},{"$f":"[1]!srE2LETt($C$19,AM17,0)","v":3.0290081956279864},{"$f":"[1]!srE2Rng($C$19,AM17)","v":1880.9890562934768}]
[null,"照射物・材質",null,null,null,0,0,0,4,0,0,0,8,0,"A",0,0,{"$f":"[2]!e5aEDthkI(ThEDtbl,F18:Q18)","v":540.02},{"$f":"R18-R17","v":1.7899999999999636},{"$f":"[2]!e5aEDflgI2S(F18:Q18)","v":"000400080A000"},{"$f":"$C$33-$R18","v":2789.98},{"$f":"[1]!srRng2E($C$11,U18)","v":75.624687499999993},null,{"$f":"[1]!srEnewGas($C$12,V18,$C$36,$C$38*100,$C$37)","v":74.048576814219189},2961.9430725687675,null,45,{"$f":"[1]!srEnew($C$15,X18,AB15)","v":63.657210770342736},{"$f":"[1]!srEnew($C$16,AB18,AC15)","v":58.811036499344084},{"$f":"[1]!srEnew($C$17,AC18,AD15)","v":58.811036499344084},{"$f":"[1]!srEnew($C$19,AD18,AE15)","v":56.485027350704129},2259.4010940281651,{"$f":"[1]!srE2LETt($C$19,AE18,0)","v":3.0044487610736188},{"$f":"[1]!srE2Rng($C$19,AE18)","v":1914.289662922811},{"$f":"[1]!srEnew($C$19,AE18,AI15)","v":56.368726893272132},2254.7490757308851,{"$f":"[1]!srE2LETt($C$19,AI18,0)","v":3.0087678251173258},{"$f":"[1]!srE2Rng($C$19,AI18)","v":1907.2185951109457},{"$f":"[1]!srEnew($C$19,AI18,AM15)","v":55.862763306314037},2234.5105322525615,{"$f":"[1]!srE2LETt($C$19,AM18,0)","v":3.0307192559290712},{"$f":"[1]!srE2Rng($C$19,AM18)","v":1878.9343238634835}]
["Dev","Si",{"$f":"$C$6&B19","v":"srim40Ar_Si"}]
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[null,"照射物表層のモールド材",null,null,null,0,0,3,0,0,6,0,0,0,"A",0,0,{"$f":"[2]!e5aEDthkI(ThEDtbl,F21:Q21)","v":130.07999999999998},{"$f":"R21-R22","v":-4.160000000000025},{"$f":"[2]!e5aEDflgI2S(F21:Q21)","v":"003006000A000"},{"$f":"$C$33-$R21","v":3199.92},{"$f":"[1]!srRng2E($C$11,U21)","v":81.97558139534884},null,{"$f":"[1]!srEnewGas($C$12,V21,$C$36,$C$38*100,$C$37)","v":80.504283495888643},{"$f":"X21*$C$7","v":3220.171339835546},null,{"$f":"AA20","v":60},{"$f":"[1]!srEnew($C$15,X21,AB20)","v":66.657453848845236},{"$f":"[1]!srEnew($C$16,AB21,AC20)","v":59.943979062669975},{"$f":"[1]!srEnew($C$17,AC21,AD20)","v":59.943979062669975},{"$f":"[1]!srEnew($C$19,AD21,AE20)","v":56.654505378459447},{"$f":"AE21*$C$7","v":2266.1802151383781},{"$f":"[1]!srE2LETt($C$19,AE21,0)","v":2.9981548352195064},{"$f":"[1]!srE2Rng($C$19,AE21)","v":1924.5939270103345},{"$f":"[1]!srEnew($C$19,AE21,AI20)","v":56.49003169424892},{"$f":"AI21*$C$7","v":2259.6012677699568},{"$f":"[1]!srE2LETt($C$19,AI21,0)","v":3.0042629141668749},{"$f":"[1]!srE2Rng($C$19,AI21)","v":1914.5939270103343},{"$f":"[1]!srEnew($C$19,AI21,AM20)","v":55.78297659945467},{"$f":"AM21*$C$7","v":2231.3190639781869},{"$f":"[1]!srE2LETt($C$19,AM21,0)","v":3.0343336831109124},{"$f":"[1]!srE2Rng($C$19,AM21)","v":1874.593927010334}]
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["Mld2",{"$f":"B16","v":"SiO2"},200,"µm 不感2",null,1,0,3,0,0,6,0,0,0,0,0,0,{"$f":"[2]!e5aEDthkI(ThEDtbl,F23:Q23)","v":134.80000000000001},{"$f":"R23-R22","v":0.56000000000000227},{"$f":"[2]!e5aEDflgI2S(F23:Q23)","v":"1030060000000"},{"$f":"$C$33-$R23","v":3195.2},{"$f":"[1]!srRng2E($C$11,U23)","v":81.906976744186039},null,{"$f":"[1]!srEnewGas($C$12,V23,$C$36,$C$38*100,$C$37)","v":80.431391054028168},3217.2556421611266,null,60,{"$f":"[1]!srEnew($C$15,X23,AB20)","v":66.572116355935407},{"$f":"[1]!srEnew($C$16,AB23,AC20)","v":59.853900597931819},{"$f":"[1]!srEnew($C$17,AC23,AD20)","v":59.853900597931819},{"$f":"[1]!srEnew($C$19,AD23,AE20)","v":56.564426913721299},2262.5770765488519,{"$f":"[1]!srE2LETt($C$19,AE23,0)","v":3.0015000899739026},{"$f":"[1]!srE2Rng($C$19,AE23)","v":1919.117156354255},{"$f":"[1]!srEnew($C$19,AE23,AI20)","v":56.399953229510771},2255.9981291804306,{"$f":"[1]!srE2LETt($C$19,AI23,0)","v":3.007608168921271},{"$f":"[1]!srE2Rng($C$19,AI23)","v":1909.1171563542548},{"$f":"[1]!srEnew($C$19,AI23,AM20)","v":55.682300668276746},2227.2920267310697,{"$f":"[1]!srE2LETt($C$19,AM23,0)","v":3.038894415550315},{"$f":"[1]!srE2Rng($C$19,AM23)","v":1869.117156354255}]
["Mld3",{"$f":"B17","v":"Kapton"},0,"µm 不感3",null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,"希望LET～13"]
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[null,"感応層2厚さ"]
["Dev3",{"$f":"B19","v":"Si"},20,"µm 感応2",null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,45,{"$f":"$C$22/COS(RADIANS(AA30))","v":707.10678118654744},{"$f":"$C$23/COS(RADIANS(AA30))","v":282.84271247461896},{"$f":"$C$24/COS(RADIANS(AA30))","v":0},{"$f":"$C$26/COS(RADIANS($AA30))","v":141.42135623730948},"µm",null,null,{"$f":"$C$28/COS(RADIANS($AA30))","v":7.0710678118654746},"µm",null,null,{"$f":"$C$30/COS(RADIANS($AA30))","v":28.284271247461898},"µm"]
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[null,"空気層","ref)params"]
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